JPS6197833U - - Google Patents
Info
- Publication number
- JPS6197833U JPS6197833U JP18309584U JP18309584U JPS6197833U JP S6197833 U JPS6197833 U JP S6197833U JP 18309584 U JP18309584 U JP 18309584U JP 18309584 U JP18309584 U JP 18309584U JP S6197833 U JPS6197833 U JP S6197833U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- moving body
- horizontal moving
- element units
- move
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183095U JPH0220825Y2 (en]) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183095U JPH0220825Y2 (en]) | 1984-11-30 | 1984-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197833U true JPS6197833U (en]) | 1986-06-23 |
| JPH0220825Y2 JPH0220825Y2 (en]) | 1990-06-06 |
Family
ID=30740613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984183095U Expired JPH0220825Y2 (en]) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220825Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138046A (ja) * | 1982-02-12 | 1983-08-16 | Mitsubishi Electric Corp | ウエハ移替装置 |
-
1984
- 1984-11-30 JP JP1984183095U patent/JPH0220825Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138046A (ja) * | 1982-02-12 | 1983-08-16 | Mitsubishi Electric Corp | ウエハ移替装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220825Y2 (en]) | 1990-06-06 |
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